Molecular Dynamics Simulations of Platinum Plasma Sputtering: A Comparative Case Study
نویسندگان
چکیده
Molecular Dynamics simulations are carried out for investigating atomic processes of platinum sputtering. Sputtered Pt atom energy distribution functions (EDF) are determined at different sputtering argon ionenergies: 100, 500, and 1000 eV. Calculated EDF show a cross-over from Thompson theory to binary collision model when increasing argon ion energy and Pt atom sputtered energy. Implanted argon ion number is depending on its kinetic energy, while it is not the case in binary collision approximation. Finally sputtering yields are greater for Thompson theory than for binary collision model at low energy, but converge to the close values at high energy.
منابع مشابه
Molecular dynamics simulations of supported metal nanocatalyst formation by plasma sputtering
Magnetron sputtering is a widely used physical vapor deposition technique for deposition and formation of nanocatalyst thin films and clusters. Nevertheless, so far only few studies investigated this formation process at the fundamental level. We here review atomic scale molecular dynamics simulations aimed at elucidating the nanocatalyst growth process through magnetron sputtering. We first in...
متن کاملMolecular Dynamics simulations of clusters and thin film growth in the context of plasma sputtering deposition
Carrying out molecular Dynamics simulations is a relevant way for understanding growth phenomena at the atomic scale. Initial conditions are defined for reproducing deposition conditions of plasma sputtering experiments. Two case studies are developed for highlighting the implementation of molecular dynamics simulations in the context of plasma sputtering deposition: ZrxCu1-x metallic glass and...
متن کاملMolecular dynamics studies of the chemical sputtering of carbon-based materials by hydrogen bombardment
A central issue in the performance of tokamak fusion devices is the choice of the plasma-facing materials. During the device operation the plasma-facing surfaces are subject to extreme heat and particle loads, as they are impinged on by escaped fusion plasma particles. Although carbon-based materials have excellent thermomechanical properties in view of the high heat flux, their use in the next...
متن کاملMolecular dynamics study on low-energy sputtering properties of MgO surfaces
In an effort to understand microscopic processes occurring between MgO protective layers and impinging plasma ions in a discharge cell of plasma-display panel, sputtering properties of MgO 100 surface by He, Ne, and Xe atoms are studied with molecular dynamics simulations. Interatomic potentials between constituent atoms are fitted to first-principles data sets for representative configurations...
متن کاملGyration Radius and Energy Study at Different Temperatures for Acetylcholine Receptor Protein in Gas Phase by Monte Carlo, Molecular and Langevin Dynamics Simulations
The determination of gyration radius is a strong research for configuration of a Macromolecule. Italso reflects molecular compactness shape. In this work, to characterize the behavior of theprotein, we observe quantities such as the radius of gyration and the average energy. We studiedthe changes of these factors as a function of temperature for Acetylcholine receptor protein in gasphase with n...
متن کامل